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Microelectromechanical systems
Results: 938

#	Item
901	MoSiON Attenuated PSM Photoresist Add to Reading List Source URL: www.compugraphics-photomasks.com - Date: 2011-09-12 07:52:35 Microtechnology Photoresist Polymers Technology Resist Photolithography Microelectromechanical systems Materials science Semiconductor device fabrication Chemistry
902	Downloaded from rsbm.royalsocietypublishing.org on October 18, 2013 Joel Mandelstam. 13 November 1919 −− 20 Add to Reading List Source URL: rsbm.royalsocietypublishing.org Language: English - Date: 2015-04-04 12:26:58 Technology Science Engineering Neil Kensington Adam Fellows of the Royal Society Microelectromechanical systems Joel Mandelstam
903	SURFACE ACOUSTIC WAVE SENSORS (SAWS): DESIGN FOR FABRICATION. MICROELECTROMECHANICAL SYSTEMS. DECEMBER 6, [removed] Add to Reading List Source URL: www.jaredkirschner.com Language: English - Date: 2011-11-21 19:11:14 Materials science Signal processing Surface acoustic wave sensor Sensors Accelerometers Surface acoustic wave Piezoelectricity Interdigital transducer Electromagnetic acoustic transducer Transducers Technology Microtechnology
904	2001 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM Add to Reading List Source URL: www.ece.umd.edu Language: English - Date: 2001-06-25 15:22:52 Science and technology in the United States Microelectromechanical systems Jerry Woodall Fax Technology Aldert van der Ziel Electromagnetism
905	Wireless RF communication in biomedical applications Add to Reading List Source URL: www.eleceng.adelaide.edu.au Language: English - Date: 2008-02-07 22:41:58 Technology Electromagnetism Surface acoustic wave Piezoelectricity Antenna Radio frequency Valve Interdigital transducer Microelectromechanical systems Transducers Microtechnology Materials science
906	Surface Micromachining for Microelectromechanical Systems JAMES M. BUSTILLO, ROGER T. HOWE, FELLOW, IEEE, AND Add to Reading List Source URL: www.ee.nthu.edu.tw Language: English - Date: 2004-02-25 03:13:04 Semiconductor device fabrication Nanotechnology Microelectromechanical systems Surface micromachining Polycrystalline silicon Chemical vapor deposition Bulk micromachining Epitaxy Deep reactive-ion etching Materials science Microtechnology Technology
907	Laser Produced Plasma EUV Sources for Device Development and HVM David C. Brandt, Igor V. Fomenkov, Michael J. Lercel, Bruno M. La Fontaine, David W. Add to Reading List Source URL: www.cymer.com Language: English* - Date: 2012-05-17 13:30:57 Extreme ultraviolet lithography Cymer Inc. Extreme ultraviolet Mechanical engineering Laser Plasma Microelectromechanical systems Physics Materials science Electromagnetic radiation
908	Microassembly Technologies for MEMS Michael B. Cohn¤‡, Karl F. Böhringer+º, J. Mark Noworolski¤‡, Angad Singh‡, Chris G. Keller§, Ken Y. Goldberg+, and Roger T. Howe¤‡ Add to Reading List Source URL: www.ee.washington.edu Language: English* - Date: 2003-07-05 01:01:00 Technology Microelectromechanical systems Surface micromachining Microfabrication Micro-Opto-Electro-Mechanical Systems Flip chip Integrated circuit Etching Three-dimensional integrated circuit Materials science Microtechnology Semiconductor device fabrication
909	PDF Document Add to Reading List Source URL: www.sensonor.com Language: English - Date: 2009-11-25 02:46:43 Engineering Sensors Electrical engineering Mechanical engineering Microelectromechanical systems Electromagnetism Sensonor Accelerometer Microelectromechanical system oscillator Technology Microtechnology Transducers
910	PDF Document Add to Reading List Source URL: www.sensonor.com Language: English - Date: 2010-01-13 10:26:39 Avionics Electromagnetism Engineering Mechanical engineering Microelectromechanical systems Transducers Sensonor Attitude and heading reference system MotionProcessing Technology Microtechnology Aircraft instruments

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